Multifunctional tunable and piezoelectric Ba1-xCaxTi1-yZryO3 thin film capacitors for energy efficiency and harvesting

Authors

  • C.J.M. Daumont Author
  • Q. Simon Author
  • S. Payan Author
  • J.L. Longuet Author
  • B. Negulescu Author
  • M. Maglione Author
  • J. Wolfman Author

DOI:

https://doi.org/10.24084/repqj14.277

Keywords:

Tunable capacitor, piezoelectric material, impedance matching, vibration energy harvesting

Abstract

Multifunctional materials exhibiting both variable permittivity under electric field and large piezoelectric coefficients can be used in microelectronic applications for energy efficiency as an active impedance matching as well as for vibration energy harvesting. We propose here the exploration of the ternary phase diagram BaTiO3-BaZrO3-CaTiO3 (BCTZ) through the (piezo) electrical characterization of thousands of thin film capacitors deposited using combinatorial pulsed laser deposition (CPLD).

Author Biographies

  • C.J.M. Daumont

    Laboratoire GREMAN, UMR7347 CNRS, Université François Rabelais, faculté de sciences et techniques, 37200 

  • Q. Simon

    Institute of Condensed Matter Chemistry of Bordeaux, ICMCB-CNRS, Université de Bordeaux, 33608 Pessac Cedex, France

  • S. Payan

    Institute of Condensed Matter Chemistry of Bordeaux, ICMCB-CNRS, Université de Bordeaux, 33608 Pessac Cedex, France 

  • J.L. Longuet

    CEA, DAM, Le Ripault, F-37260 Monts, France

  • B. Negulescu

    Laboratoire GREMAN, UMR7347 CNRS, Université François Rabelais, faculté de sciences et techniques, 37200 Tours (France)

  • M. Maglione

    Institute of Condensed Matter Chemistry of Bordeaux, ICMCB-CNRS, Université de Bordeaux, 33608 Pessac Cedex, France

  • J. Wolfman

    Laboratoire GREMAN, UMR7347 CNRS, Université François Rabelais, faculté de sciences et techniques, 37200 Tours (France)

Downloads

Published

2024-01-16

Issue

Vol. 14 No. 2 (2016)

Section

Articles