Design and Fabrication of Piezoresistive Strain-Gauges for Harsh Environment Applications

Authors

  • P. Kulha Author
  • A. Boura Author
  • M. Husak Author

DOI:

https://doi.org/10.24084/repqj08.510

Abstract

Maximum  operating  temperature  is  usuallyone  of  the  limiting  factors  for  using  of  conventional  sensors  and  other  electronic  devices.  High-temperature  sensors  and  electronics  are  required  in some special applications e.g. measurement of deformations, stresses  and  pressures  inside  power  generators.  The  design  methodology  of  the  some  piezoresistive  sensors  utilizing  FEM  simulations  is  presented.  Piezoresistive  sensors  based  on  thin-film   metal   sputtered   layers,   silicon-on-insulator   (SOI)   and   nanocrystalline   diamond   layers   (NCD)   were   successfully   designed,  fabricated  and  measured.  The  fabricated  sensors  are  able to operate at temperatures up to 250 °C. Extensive study of sensor parameters e.g. deformation sensitivity, edge and contact resistances,   temperature   dependences   gauge   factor,   bridge   output   voltage   was   performed.   The   measured   values   and   investigated  findings  can  be  used  for  calibration  of  simulation  software  and  in  prospective  design  of  more  complex  sensor  structures.

Author Biographies

  • P. Kulha

    Department of microelectronics

    Czech Technical University,

    Technicka 2, 16627 Prague (Czech Republic)

    kulhap@fel.cvut.cz

    Phone:+42224352793, e-mail: kulhap@fel.cvut.cz

  • A. Boura

    Department of microelectronics

    Czech Technical University,

    Technicka 2, 16627 Prague (Czech Republic)

    Phone:+42224352793

  • M. Husak

    Department of microelectronics

    Czech Technical University,

    Technicka 2, 16627 Prague (Czech Republic)

    Phone:+42224352793

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Published

2024-01-24

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Articles